n 2007.08

Advanced exposure optical system projection objective demonstration team built in the National Key Laboratory of Applied Optics.

n 2009.07

The team won the national projection objective research and development project. China's high-end exposure optical system has entered the stage of technology research and development.

n 2013.09

Exposure optical system has entered the stage of manufacturing.

n 2014.08

Changchun National Extreme Precision Optics Co., Ltd.(CNEPO) was incorporated.

n 2016.01

The company won the support of the national projection objective research and development project again.

n 2016.09

The first NA0.75 lithography projection lens passed the test on the whole machine and acquired acceptance.

n 2017.04

The first NA0.75 illumination system in China passed system performance test on the whole machine and acquired acceptance.