Products

Advanced Lithography Optics
Lithography optics: Epolith A075

Epolith A075  is the first advanced lithography optics at 90-nanometer process with all independent intellectual property rights in our country which is one of the core research achievements of the National Science and Technology Major Project (02 Major Project ). 

The successful development of Epolith A075 indicates that China's ultra-precision optical technology has ranked in the advanced level in the world, and has made a good technical and industrial foundation for the development and industrialization of immersion lithography optics system. 

Characteristic Description 

The first lithography optics system at 90-nanometer process in China, ArF laser light source,  NA0.75, large field of view, high speed dynamic compensation, off-axis illumination, high uniformity illumination 

Parameters

Model

Epolith A075
               Central Wavelength               193nm
NA(image space)0.75
Resolution90nm
Field Size  26mm×10.5mm
Wavefront Error≤5.1nm
Distortion≤5.7 nm

Exposure Results

Ø Resolution test: 90nm dense line, L/S (line and space ratio) is 1:1, Pitch is 180nm

曝光结果1

  90nm dense line measured by SEM (scanning electron micorscope)              Top view of 85nm horizontal / vertical dense line

Ø LER (Line edge roughness) test: 90nm line edge roughness LER~5.0nm

曝光结果2                             

                           Domestic equipment SSA600
                                          LER 4.9nm@BF