Bottom Window of 90nm Projection Lens 

n Lens diameter: φ70.8mm 

n Lens thickness: 5mm 

n Material: Fused Silica 

High Precision Optical Element 

n Diameter: φ194±0.2mm 

n Thickness: 36.68mm  

n Surface figure tolerance (RMS): 0.51nm 

AB Cylinder Mirror 

n The beam transmission unit for 248nm and 193nm lithography machine shapes the optical field 

n Dimension: 20mm × 10mm 

Gradient Filter 

n Digital type 

n Correction capability: Under the condition of traditional illumination mode, NA=0.5 and coherence factor σ= 0.5, the corrected integral uniformity is better than 0.3 % 

n Dimension: 140mm×75mm×3.1mm 

Narrow-band Optical Filter 

n Applicable for filtering the light emitted by the mercury lamp. 

n Wavelength: i line, g line, h line 

n Spectral characteristics: T>95%@365nm 7nm(FWHM) 

n Incident angle: Vertical incident 

n Dimension: φ90mm