CNEPO offers customized products of standard models and non-standard models of transmission spheres. The RMS of reference surface is better than 2nm. Our self-developed products have been applied in the development of the exposure optical system of the National Science and Technology Major Project 02.We provide optical detection scheme and interferometer matching product customization according to the user detection requirements.
Transmission Flats are used when measuring the surface quality or transmitted wavefront of flat surfaces or optics. Transmission Spheres are used when measuring the surface quality or transmitted wavefront of concave or convex surfaces or optics. At present, the effective detection caliber of the products is 100mm and 150mm, and other caliber can be customized according to user requirements.
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Test Result of CNEPO Datum TS06H2.2A